A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure | Zendy

Satoshi Sakiyama | Zendy; Tetuya Hirabaru | Zendy; Osamu Fukumasa | Zendy

Open Access

A plasma reactor based on the forced constricted type dc plasma jet and its application to thermal plasma processing in low pressure

Author(s) -

Satoshi Sakiyama,

Tetuya Hirabaru,

Osamu Fukumasa

Publication year - 1992

Publication title -

review of scientific instruments

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.605

H-Index - 165

eISSN - 1089-7623

pISSN - 0034-6748

DOI - 10.1063/1.1142945

Subject(s) - plasma , materials science , jet (fluid) , thermal , nuclear engineering , electric arc , plasma torch , arc (geometry) , dense plasma focus , mechanics , thermodynamics , chemistry , mechanical engineering , nuclear physics , physics , electrode , engineering

A reactor consisting of a forced constricted type dc plasma jet generator and a feed ring has been developed. In order to demonstrate the application feasibility of this reactor to low pressure plasma processing, the characteristics of the forced constricted arc in low pressure, and production of ultrafine particles of refractory materials (Al2O3, ZrC, TiC) are studied

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