Open AccessTip artifacts of microfabricated force sensors for atomic force microscopy
Author(s) -
Peter Grütter,
W. Zimmermann-Edling,
D. Brodbeck
Publication year - 1992
Publication title -
applied physics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 1.182
H-Index - 442
eISSN - 1077-3118
pISSN - 0003-6951
DOI - 10.1063/1.106862
Subject(s) - microfabrication , mesoscopic physics , atomic force microscopy , conductive atomic force microscopy , magnetic force microscope , materials science , atomic force acoustic microscopy , microscopy , non contact atomic force microscopy , scanning electron microscope , kelvin probe force microscope , nanotechnology , atomic units , chemical force microscopy , scanning ion conductance microscopy , scanning probe microscopy , optics , scanning confocal electron microscopy , physics , composite material , condensed matter physics , fabrication , alternative medicine , magnetization , pathology , quantum mechanics , magnetic field , medicine
It is demonstrated that due to inevitable intrinsic imperfections in the microfabrication process of atomic force microscopy (AFM) tips, images of rough surfaces can be totally dominated by tip artifacts. These images reflect the mesoscopic tip shape as concluded from a comparison of AFM and scanning electron microscopy images of the tip and sample. These tip artifacts have been found on a scale of 20–600 nm, showing the necessity of characterizing the tip shape in order to make reliable sample‐specific statements
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