Open AccessImage reconstruction of TGZ3 grating by eliminating tip‐sample convolution effect in AFM
Author(s) -
Wu Teng,
Lv Luyao,
Zou Yu,
Han Guoqiang
Publication year - 2020
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2020.0378
Subject(s) - grating , optics , materials science , radius of curvature , convolution (computer science) , curvature , sample (material) , atomic force microscopy , calibration , nanometrology , radius , physics , computer science , artificial intelligence , nanotechnology , geometry , mathematics , mean curvature , mean curvature flow , quantum mechanics , artificial neural network , thermodynamics , computer security
Accurate and meticulous measurement is an important prerequisite to obtain the real surface information of samples in atomic force microscopy (AFM). A severe problem is the frequent occurrence of measurement errors, which are mainly caused by the nonlinearity of the probe driver, the temperature drift of the system and the tip characteristics. The measurement errors caused by probe tip are the main source of errors in AFM nanoscale measurements. The shape and state of AFM tip will distort the AFM image from the actual sample morphology. If the information about the probe is known, the measurement error caused by the probe tip can be greatly reduced. In order to obtain accurate AFM images, a new method based on geometric measurement model and blind tip reconstruction is proposed to eliminate tip‐sample convolution in the measurement of grating samples. The static and dynamic characteristics of the AFM tip are described by four parameters: cone angle, curvature radius, scanning inclination angle and mounting inclination angle. Finally, the feasibility and effectiveness of the new calibration method are verified by evaluating the image reconstruction quality. In conclusion, the proposed method can effectively reconstruct accurate AFM images of the grating.