Open AccessPDMS‐based hot embossing method of fabricating SU‐8 photoresist conical nozzle for inkjet print‐head
Author(s) -
Yan Shixia,
Wang Xing,
Li Kehong,
Wang Fengwei,
Guo Ran,
Zou Helin
Publication year - 2020
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2019.0696
Subject(s) - photoresist , nozzle , embossing , materials science , fabrication , composite material , conical surface , mold , head (geology) , coating , optics , mechanical engineering , layer (electronics) , engineering , medicine , alternative medicine , pathology , geomorphology , geology , physics
This work reports a PDMS‐based hot embossing technique. The proposed method enables rapid, low‐cost and mass‐produced fabrication of SU‐8 photoresist conical nozzle for inkjet print‐head with soft PDMS moulds. The hydrophobic time for SU‐8 master mould treated by trimethyldichlorosilane (TMCS) was determined. And the optimised thickness of SU‐8 photoresist before hot embossing was 58.5 ± 1.55 μm corresponding to 3750 r/min of spin coating speed. The imprinting parameters were investigated. The highest replication precision was obtained in the embossed SU‐8 conical nozzle processed by an embossing pressure of 2.57 MPa, an embossing temperature of 80°C, and an embossing time of 6 min. Finally, this work presents the fabrication of the SU‐8 conical nozzle plate with the large aperture of 40.01 ± 1.24 μm, small aperture of 27.12 ± 1.07 μm, and the nozzle height of 50 ± 1.26 μm.