Open AccessBias thermal stability improvement of MEMS gyroscope with quadrature motion correction and temperature self‐sensing compensation
Author(s) -
Cui Jian,
Zhao Qiancheng
Publication year - 2020
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2019.0479
Subject(s) - gyroscope , vibrating structure gyroscope , control theory (sociology) , microelectromechanical systems , quadrature (astronomy) , tuning fork , physics , materials science , acoustics , optics , computer science , optoelectronics , vibration , control (management) , quantum mechanics , artificial intelligence
Bias thermal stability of microelectromechanical system (MEMS) gyroscope is a significant performance parameter for industrial and tactical applications. The quadrature coupling motion and demodulation phase error are two main sources of bias drift. This work presents a MEMS tuning fork gyroscope with dedicated electrostatic correction combs finger structure that can be implemented to suppress the quadrature motion. By utilising a closed‐loop control for the coupling stiffness, the temperature variation of quadrature motion achieves >260 times of magnitude reduction, resulting in the thermal bias drift decreased from 0.98 to 0.18°/s with 5.4 times improvement over the temperature from −40 to 60°C. The results indicate that the variation of the quadrature motion is the dominant factor that determines the temperature bias drift of the custom‐designed gyroscope. The compensated bias stability (1 σ ) is measured to be ∼8.6°/h by using temperature self‐sensing compensation technique over the whole temperature operating range, which demonstrates a considerably competitive result for the tactical‐grade MEMS gyroscope.