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open-access-imgOpen AccessWaveguide integrated GaN distributed Bragg reflector cavity using low‐cost nanolithography
Jia Simeng,
Boulbar Emmanuel D. Le,
Balram Krishna C.,
Pugh Jon R.,
Wang Tao,
Allsopp Duncan W.E.,
Shields Philip A.,
Cryan Martin J.
Publication year2019
Publication title
micro and nano letters
Resource typeJournals
PublisherThe Institution of Engineering and Technology
This work presents the design, fabrication and measurement of gallium nitride (GaN) distributed Bragg reflector cavities integrated with input and output grating couplers. The devices are fabricated using a new, low‐cost nanolithography technique: displacement Talbot lithography combined with direct laser writing lithography. The finite‐difference time‐domain method has been used to design all the components and measured and modelled results show good agreement. Such devices have applications in GaN integrated photonics and biosensing.
Subject(s)alternative medicine , distributed bragg reflector , fabrication , fiber bragg grating , gallium nitride , grating , layer (electronics) , lithography , materials science , medicine , nanolithography , nanotechnology , optics , optoelectronics , pathology , photolithography , photonics , physics , wavelength
SCImago Journal Rank0.25

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