Open AccessAnisotropic wet etching on the β‐phase poly(vinylidene fluoride) film
Author(s) -
Miki Hirofumi,
Sugii Ryota,
Tominaga Taisuke,
Tsuchitani Shigeki
Publication year - 2020
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2019.0304
Subject(s) - materials science , etching (microfabrication) , fabrication , anisotropy , piezoelectricity , phase (matter) , fluoride , composite material , dry etching , reactive ion etching , optics , chemistry , medicine , inorganic chemistry , alternative medicine , physics , organic chemistry , pathology , layer (electronics)
The ability to fabricate micro patterns or micro structures directly on a flexible and piezoelectric β‐phase poly(vinylidene fluoride) (PVDF) film, has potential applications in the field of micro‐electro‐mechanical systems. The authors realised several tens to several hundred of micro patterns directly on a 110‐μm thick flexible β‐phase PVDF film by wet‐etching technology. Through experiments, the authors also found that the β‐phase PVDF film shows anisotropic etching characteristic in the proposed wet‐etching process. In this Letter, the authors reported β‐phase PVDF film micropattern fabrication process and its anisotropic wet‐etching properties for the first time.