Open AccessTrans‐scale precision positioning stage without guideway based on inertial stick–slip driving
Author(s) -
Zhong Bowen,
Zhu Jie,
Jin Ziqi,
He Haidong,
Wang Zhenhua,
Sun Lining
Publication year - 2019
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2018.5684
Subject(s) - inertial frame of reference , slip (aerodynamics) , voltage , actuator , piezoelectricity , magnet , inertial navigation system , acoustics , materials science , control theory (sociology) , displacement (psychology) , mechanics , mechanical engineering , physics , computer science , engineering , classical mechanics , aerospace engineering , electrical engineering , psychology , control (management) , artificial intelligence , psychotherapist
In this work, a trans‐scale precision positioning stage without guideway based on the inertial stick–slip driving is proposed, which can provide nano‐scale resolution ratio and output long‐range motion. The stage consists of an encapsulated piezoelectric actuator, a connection block, a base, a pair of ceramic bars, and magnets, and the volume is 25 mm × 17 mm × 13.5 mm. The structure and the principle are introduced in detail. To investigate the locomotion characteristics, a prototype is manufactured, and a series of experiments are carried out. The velocity can reach 13 mm/s when the driving frequency is 2.5 kHz and the resolution is 2 nm. The experimental results confirm that the prototype based on the inertial stick–slip driving is valid through magnets. The good linear relationships exist between the displacement curves and time under various driving voltages and frequencies.