
Tracking of square reference signals using internal model‐based LQG robust controller for positioning of a micro‐electro‐mechanical systems micromirror
Author(s) -
Tan Jiazheng,
Sun Weijie,
Yeow John
Publication year - 2018
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2017.0681
Subject(s) - linear quadratic gaussian control , control theory (sociology) , controller (irrigation) , tracking (education) , noise (video) , optimal projection equations , computer science , gaussian , lorentz force , physics , magnetic field , control (management) , artificial intelligence , psychology , pedagogy , agronomy , biology , quantum mechanics , image (mathematics)
This work studies the Lorentz force‐based polymer hard‐magnetic micromirror for optical switch application. For this purpose, a robust control design is proposed, which is based on the linear quadratic gaussian method incorporating with the well‐known internal model principle. The proposed scheme can simultaneously be easily implemented and it can improve the positioning performances and noise rejection ability. The effectiveness is verified by experimental results.