Open AccessPreparation and chemical mechanical polishing performance of CeO 2 /CeF 3 composite powders
Author(s) -
Zhou Chuan,
Zhu Dachuan
Publication year - 2018
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2017.0303
Subject(s) - materials science , polishing , scanning electron microscope , diffractometer , composite number , particle size , calcination , chemical engineering , particle (ecology) , composite material , chemistry , engineering , geology , catalysis , biochemistry , oceanography
This work reported a simple route for preparing CeO 2 /CeF 3 composite powders. Cerium nitrate hexahydrate, oxalic acid dihydrate and ammonium fluoride were milled and subsequently calcined to obtain the composite powders. X‐ray diffractometer, field emission scanning electron microscope, transmission electron microscopy, zeta potential tester, and polishing test were utilised to characterise those products and study the effect of doped fluorine amount on their physicochemical characteristics and chemical mechanical polishing properties. The results show that incorporation of 7 wt% fluorine into the starting materials can change the particle morphology from large sheet for pure CeO 2 into uniform spherical particles with size of 30–50 nm. The composite powder with 7 wt% fluorine exhibits great suspension stability and relatively high material removal rate. Meanwhile, this slurry facilitates obtaining smoother surface after polishing, which may be related to the changes of particle morphology and decrease in overall hardness of abrasives.