Open AccessSynthesis of TiO 2 –Al 2 O 3 and TiO 2 –Ta 2 O 5 composite nanotubes on planar Si substrates
Author(s) -
Chappanda Karumbaiah N.,
Misra Mano,
Mohanty Swomitra K.
Publication year - 2017
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0516
Subject(s) - anodizing , materials science , nanocomposite , silicon , titanium , sputtering , chemical engineering , nanotechnology , thin film , composite number , composite material , metallurgy , aluminium , engineering
Morphological studies of TiO 2 –Al 2 O 3 and TiO 2 –Ta 2 O 5 nanocomposite nanotubes synthesised on silicon substrates are presented here. Nanocomposite Ti–Al and Ti–Ta thin films were deposited on silicon substrates via simultaneous multi‐target sputtering of Ti and Al targets or Ti and Ta targets, followed by anodisation in a fluorinated electrolyte. By increasing the Al or Ta concentration in the sputtered films, the morphology of the anodised films is changed from tubular oxides (with ripples on the outer walls) to well‐aligned porous oxides (smooth walls, near zero gap between walls). By increasing the concentrations of Ta, formation of random Y‐branched porous oxides in the anodised films is demonstrated. These nanotubes were synthesised on a planar substrates making them suitable for integrated circuits.