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Micromachining approach for improving uniformity of the topography of microchannels
Author(s) -
Kouravand Shahriar,
Moetakef Imani Behnam,
Kermani Ali Mashaallah
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0515
Subject(s) - microchannel , surface roughness , surface micromachining , materials science , vortex , surface finish , turbulence , mechanics , optics , work (physics) , mechanical engineering , nanotechnology , composite material , physics , engineering , medicine , alternative medicine , pathology , fabrication
Surface topography has an important role in the motion of fluid in microchannels due to the fluid boundary layer. The cross surface roughness variations result in some problems such as turbulence, confusion in microchannel's work and in creating vortex. In this research, the topography of the floor in the microchannel is investigated experimentally. A large difference between surface topography of the sides and channel's centreline is observed. The main reason for this difference is the effect of the back cutting in trochoidal paths. A new approach is proposed to solve this problem and decrease the amount of cross surface roughness variations by eliminating the effect of back cutting. The efficiency of the proposed approach is confirmed by experiments. Scanning electron microscope images show that using this method the topography of the surface is uniformed.

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