Open AccessSynthesis of superhydrophobic surfaces by polytetrafluoroethylene coating on rectangular grid microstructures
Author(s) -
Sun Chao,
Eom Inyong,
Kim Bonghwan
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0282
Subject(s) - polytetrafluoroethylene , materials science , contact angle , deep reactive ion etching , coating , microstructure , substrate (aquarium) , superhydrophobic coating , composite material , etching (microfabrication) , polymer , silicon , reactive ion etching , layer (electronics) , metallurgy , oceanography , geology
A simple process to synthesize superhydrophobic surfaces by deep reactive ion etching (DRIE) and polytetrafluoroethylene (PTFE) coating of rectangular grid structures on Si substrate was developed. The Si substrate possesses unique quadrilateral network‐type Si microstructures, which when sputtered upon with PTFE, creates a superhydrophobic surface. The fluorinated polymer also exhibited hydrophobic properties where the contact angle of the Si substrate after the PTFE coating was 108.4°. The DRIE etching and PTFE coating together increased the contact angle up to 158.6° for a 40 μm height and 10 × 10 m 2 area, thus synergistically increasing the hydrophobicity of the surface.