Open AccessInvestigation into the effect of shock acceleration characteristics on the performance of a proposed MEMS inertial switch
Author(s) -
Cao Yun,
Xi Zhanwen,
Wang Jiong,
Nie Weirong,
Yu Pingxin
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0256
Subject(s) - acceleration , response time , rise time , shock response spectrum , shock (circulatory) , amplitude , pulse (music) , microelectromechanical systems , inertial frame of reference , materials science , fictitious force , pulse width modulation , time constant , mechanics , accelerometer , range (aeronautics) , physics , optics , optoelectronics , electrical engineering , engineering , computer science , classical mechanics , voltage , medicine , computer graphics (images) , quantum mechanics , detector , composite material
Rapid response is required for many applications of a micro‐electro‐mechanical system (MEMS) inertial switch device. To achieve a rapid response and have a long contact time, the influence of applied acceleration characteristics on the performance of a proposed MEMS inertial switch, such as response time and contact time, was investigated. The results indicate that the response time of the switch gradually decreases, but the contact time rapidly increases first and then smoothly increases, as the acceleration amplitude increases and the pulse width is a constant. Furthermore, the broadening of acceleration pulse width will result in a sudden increase of response time. For the sake of rapid response, the switch should be used within a limited pulse width range of 0 < t 0 < 5.78 π / ω n 1 , as the applied acceleration amplitude is 1.2 times of the acceleration threshold. The fabricated switches were tested by a shock test device. The test results are in good agreement with the simulation results.