Open AccessActive vibration isolator based on micromachined electrostatic actuators
Author(s) -
Li Chong,
Yang Haoyue,
Dean Robert N.,
Flowers George T.
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0173
Subject(s) - isolator , vibration isolation , actuator , microelectromechanical systems , vibration , voltage , capacitor , spring (device) , active vibration control , materials science , vibration control , acoustics , electronic engineering , electrical engineering , engineering , structural engineering , optoelectronics , physics
Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration isolator with a simple structure, which requires a constant voltage source and series capacitor, is proposed. The principle of the spring softening effect is analysed, which can avoid a specific external disturbance by changing its resonant frequency. A simulation study was performed to verify the feasibility of this type of isolator.