Active vibration isolator based on micromachined electrostatic actuators | Zendy

Li Chong | Zendy; Yang Haoyue | Zendy; Dean Robert N. | Zendy; Flowers George T. | Zendy

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Active vibration isolator based on micromachined electrostatic actuators

Author(s) -

Li Chong,

Yang Haoyue,

Dean Robert N.,

Flowers George T.

Publication year - 2016

Publication title -

micro and nano letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.25

H-Index - 31

ISSN - 1750-0443

DOI - 10.1049/mnl.2016.0173

Subject(s) - isolator , vibration isolation , actuator , microelectromechanical systems , vibration , voltage , capacitor , spring (device) , active vibration control , materials science , vibration control , acoustics , electronic engineering , electrical engineering , engineering , structural engineering , optoelectronics , physics

Parallel plate actuators (PPAs) are widely used actuators in microelectromechanical systems. A PPA can be utilised as a passive/active vibration isolator. A novel active vibration isolator with a simple structure, which requires a constant voltage source and series capacitor, is proposed. The principle of the spring softening effect is analysed, which can avoid a specific external disturbance by changing its resonant frequency. A simulation study was performed to verify the feasibility of this type of isolator.

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