Open AccessModelling and characterisation of a micromachined resonant pressure sensor with piezoelectric excitation and sensing
Author(s) -
Cheng Rongjun,
Zhao Yulong,
Li Cun,
Li Bo,
Zhang Qi
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2016.0016
Subject(s) - resonator , materials science , diaphragm (acoustics) , surface micromachining , sensitivity (control systems) , piezoelectricity , microelectromechanical systems , optoelectronics , acoustics , pressure sensor , excitation , oscillation (cell signaling) , piezoelectric sensor , finite element method , electronic engineering , fabrication , electrical engineering , vibration , engineering , mechanical engineering , medicine , physics , alternative medicine , structural engineering , pathology , composite material , biology , genetics
A resonant pressure sensor with piezoelectric excitation and sensing is presented, which is realised by combining a micromachined diaphragm and a quartz resonator. The sensor performance is improved by introducing double enhancement beams into the diaphragm. Finite element method is utilised to reveal the validity and optimise the structural dimensions. A self‐excitation circuit is designed to drive the resonator into steady oscillation. The sensor chip is fabricated by bulk micromachining technologies and packaged in a metal shell in the inert gas environment for characterisation. The performance characteristics including the short‐term drift, temperature characteristic and quality factor are investigated. The experimental results demonstrate that the sensor features a high sensitivity of 100.45 Hz/kPa and a short‐term drift <14 ppm in the operating range of −10∼10 kPa at room temperature. Owing to the excellent performance in sensitivity and accuracy, the sensor can be applied for micropressure measurement.