Open AccessPhotolithographically definable SU‐8–alumina composite for W‐band dielectric resonator antennas
Author(s) -
AlKhalli Najeeb,
Alduraibi Mohammad,
Debbar Nacer,
Saleem Muhammad,
Alkanhal Majeed,
Sebak Abdelrazik,
AbdelRahman Mohamed
Publication year - 2016
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2015.0389
Subject(s) - materials science , photoresist , composite number , ceramic , dielectric , composite material , relative permittivity , permittivity , dielectric resonator , lithography , resonator , layer (electronics) , optoelectronics
A novel process has been developed for fabricating ceramic dielectric structures with dimensions applicable to W‐band millimetre wave dielectric resonator antennas. The ceramic dielectric structures are based on composites of SU‐8 2150 photoresist and alumina (Al 2 O 3 )‐alpha nanopowder. The effects of increasing the weight percentage of Al 2 O 3 nanopowder on the photo‐polymerisation of the SU‐8–Al 2 O 3 composite were systematically investigated. Cylindrical structures with thicknesses up to 500 µm have been fabricated using single casted conventional ultraviolet lithography. The relative permittivity of SU‐8–Al 2 O 3 composites at different weight percentages of Al 2 O 3 was studied showing an increase from a relative permittivity of 4.5 to 5.66 with increasing the Al 2 O 3 weight percentage from 0 to 35%. Also, finally, double layer manufacturing of ceramic SU‐8–Al 2 O 3 composite structures was demonstrated.