Open AccessCapacitive micromachined ultrasonic transducer (CMUT) array with single‐layer graphene membrane
Author(s) -
Chong PoFat,
Shi Xiaomei,
Cheng ChingHsiang
Publication year - 2014
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2014.0421
Subject(s) - capacitive micromachined ultrasonic transducers , capacitive sensing , ultrasonic sensor , materials science , transducer , layer (electronics) , acoustics , optoelectronics , graphene , surface micromachining , nanotechnology , electrical engineering , engineering , fabrication , physics , medicine , alternative medicine , pathology
A capacitive micromachined ultrasonic transducer (CMUT) with a graphene membrane is reported. The CMUT membranes were commonly made from very thin silicon nitride or metal material. To date, no graphene CMUT has been successfully used. In this reported work, a photomask were used for the cavity pattern to make a 1μm layer EPON SU‐8 photoresist on the silicon substrate. Then a single‐layer graphene were tranferred directly to be attached to the EPON SU‐8 cavity layer to form the CMUT with a graphene membrane. The resonance frequency was measured to be 95 MHz in air.