Open AccessFabrication of nanochannels using underexposed nanoimprint method
Author(s) -
Wang Zhiwen,
Chu Jinkui,
Wang Qianyi,
Zhang Ran,
Cui Yan
Publication year - 2015
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2014.0412
Subject(s) - fabrication , materials science , nanotechnology , nanolithography , medicine , alternative medicine , pathology
Uniform arrays of nanochannels were made using an underexposed nanoimprint method. The nanotrenches were bended uniformly, and the degree of the collapse was controlled by the exposure time. After deposition of the sealing material, nanochannels with a dimension of 100 nm were successfully fabricated. The blocking problem was solved by adjusting the parameters of the gratings. The proposed fabrication technique can be very helpful in micro‐/nanoanalysis systems.