Open AccessStructured diaphragm with a centre boss and four peninsulas for high sensitivity and high linearity pressure sensors
Author(s) -
Huang Xian,
Zhang Dacheng
Publication year - 2014
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2014.0154
Subject(s) - boss , linearity , sensitivity (control systems) , diaphragm (acoustics) , finite element method , pressure sensor , pressure measurement , materials science , span (engineering) , nonlinear system , peninsula , acoustics , engineering , structural engineering , electrical engineering , mechanical engineering , electronic engineering , physics , geography , metallurgy , archaeology , quantum mechanics , loudspeaker
Using the structured diaphragm with a centre boss and four peninsulas (CBP structure), a high sensitivity and high linearity pressure sensor for low pressure ranges was demonstrated. The finite element analysis indicated that the CBP structure could achieve a far better performance than other typical structures for low pressure applications. In accordance with the simulation, the fabricated pressure sensor showed a sensitivity of 21.0 mV/V full‐scale output and a nonlinearity error of 0.15% full‐scale span in the pressure range of 0–5 kPa. The sensors with the CBP structure are potentially a better choice for measuring low pressures.