Dynamic behaviour of atomic force microscope‐based nanomachining based on a modified couple stress theory

A modified couple stress theory is used to analyse the dynamic displacement of an atomic force microscope (AFM) cantilever during nanomachining. According to the analysis, the results show that the effect of size‐dependence on the vibration behaviour of the AFM cantilever is obvious. The displacement obtained based on the modified couple stress theory is lower than that based on the classical beam theory. The maximum displacement of nanomachining with the AFM cantilever represents the cutting depth. When the excitation frequency is closer to the natural frequency of the cantilever, a larger material removal rate is obtained.