Open AccessStructural investigation of silicon nanowires with grazing incidence small angle X‐ray scattering
Author(s) -
Buttard Denis,
Schülli Tobias,
Oehler Fabrice,
Gentile Pascal
Publication year - 2013
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2013.0405
Subject(s) - scattering , nanowire , silicon , materials science , small angle x ray scattering , incidence (geometry) , optics , grazing incidence small angle scattering , x ray , morphology (biology) , condensed matter physics , molecular physics , optoelectronics , physics , small angle neutron scattering , neutron scattering , biology , genetics
Presented is a structural investigation of silicon nanowires, which is conducted with grazing incidence small angle X‐ray scattering. The morphology of the wires is analysed following experimental measurements. Three diameters (50, 100 and 200 nm) are investigated in relation to the aspect ratio of the wires (length 25 µm). Periodic fringes because of the weak distribution of the diameter are observed on the experimental images. The asymptotic behaviour of the scattering signal along the q y direction is also analysed and presented.