Open AccessHKUST‐1 coated piezoresistive microcantilever array for volatile organic compound sensing
Author(s) -
Ellern Ilya,
Venkatasubramanian Anandram,
Lee JinHwan,
Hesketh Peter,
Stavila Vitalie,
Robinson Alex,
Allendorf Mark
Publication year - 2013
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2013.0390
Subject(s) - piezoresistive effect , materials science , microporous material , cantilever , adsorption , metal organic framework , nanotechnology , response time , chemiresistor , analyte , layer (electronics) , volatile organic compound , optoelectronics , chemical engineering , composite material , chemistry , chromatography , organic chemistry , computer graphics (images) , computer science , engineering
The HKUST‐1 metal‐organic framework (MOF) was selected because of the large internal surface area, excellent stability and known properties. Mechanical strain is generated upon the adsorption of analytes into the MOF; it is proportional to concentration and is a function of adsorbed species. Piezoresistive microcantilevers serve as a transduction mechanism to convert surface strain into electrical signals. N‐doped piezoresistive cantilever arrays were fabricated with ten structures per die. Thin films of HKUST‐1 were grown at room temperature using layer‐by‐layer techniques. Dry nitrogen was used as a carrier gas to expose devices to varying concentrations of 12 different volatile organic compounds (VOCs). Results show that stress‐induced piezoresistive microcantilever array sensors with MOF coatings can provide a highly sensitive and reversible sensing mechanism for water vapour and methanol. Characteristic response features allow discrimination based on shape, response time constants and magnitude of response for other VOCs. Devices provided reliable data and proved durable over 18 months of testing. The key advantages of this type of sensor are higher sensitivity with a microporous MOFs, reversible response, α single chip sensing system and low power operation.