Open AccessLift‐off process of piezoelectric lead–zirconate–titanate thin film using self‐assembled monolayer as sacrificial layer
Author(s) -
Lu Jian,
Takagi Hideki,
Maeda Ryutaro
Publication year - 2013
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2012.0888
Subject(s) - lead zirconate titanate , monolayer , materials science , piezoelectricity , lift (data mining) , layer (electronics) , thin film , composite material , lead (geology) , nanotechnology , optoelectronics , ferroelectricity , computer science , dielectric , geomorphology , geology , data mining
In this work, a hydrophobic self‐assembled monolayer, perfluorodecyltrichlorosilane (FDTS) (CF 3 (CF 2 ) 7 (CH2) 2 SiCl 3 ), was proposed as a sacrificial layer for a lift‐off process of a piezoelectric lead–zirconate–titanate (PZT) thin film on a Pt/Ti/SiO 2 /Si substrate. A FDTS fine pattern was firstly vapour deposited on a Pt/Ti/SiO 2 /Si substrate by a lift‐off process, and then the PZT precursor was spin‐coated on the Pt/Ti/SiO 2 /Si substrate, post‐baked so the solvent decomposed and evaporated and annealed for crystallisation. The experimental results demonstrated that the super‐hydrophobic FDTS with a contact angle of >120° is effective in preventing PZT crystallisation because of its thermal stability during PZT post‐baking, and its barrier‐effects between the spin‐coated PZT precursor and the Pt/Ti substrate. After removing the FDTS and the PZT which is on top of the FDTS by a second lift‐off process using ultrasonic agitation, a PZT fine pattern was successfully obtained on the Pt/Ti/SiO 2 /Si substrate with a thickness of 200–300 nm and feature size of a few tens of microns. In this Letter, the hydrophobic properties and surface morphology of different types of FDTS were studied and its barrier‐effect on PZT crystallisation were analysed. The effects of PZT thickness in each spin‐coating to lift‐off the and PZT properties were investigated. The obtained PZT pattern was evaluated by an X‐ray diffraction measurement.