Open AccessSU‐8 piezoresistive microcantilever with high gauge factor
Author(s) -
Kok Siong Lee,
Abdul Azid Ishak,
Sidek Othman,
Ibrahim Kamarulazizi,
Devarajan Mutharasu
Publication year - 2013
Publication title -
micro and nano letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.25
H-Index - 31
ISSN - 1750-0443
DOI - 10.1049/mnl.2012.0736
Subject(s) - gauge factor , piezoresistive effect , gauge (firearms) , materials science , physics , optoelectronics , medicine , metallurgy , pathology , alternative medicine , fabrication
Presented is an SU‐8 microcantilever sensor with integrated piezoresistors made of a mixture of SU‐8 polymer and silver nanoparticles. The resulting composite is a spin‐coatable and ultraviolet patternable conductive polymer, which can be easily incorporated with any SU‐8‐based microdevice. The microfabrication technique used in this work is based on adhesive bonding of the cantilever layers with the thick support base to obtain a three‐dimensional structures device, which is a cost‐effective and fast fabrication process. Based on the current–voltage ( I – V ) test, the fabricated piezoresistors exhibit a linear resistance characteristic with good conductivity. The gauge factor calculated from the deflection test was obtained to be as high as 26.3, demonstrating the capability for embedded SU‐8/Ag piezoresistors to improve sensitivity when using polymeric material as a sensor platform.