Open Access100 GHz Silicon‐based micro‐machined patch antenna and arrays
Author(s) -
Liu Jingtian,
Chen Shuming,
Xiao Ke,
Chen Xiaowen
Publication year - 2019
Publication title -
the journal of engineering
Language(s) - English
Resource type - Journals
ISSN - 2051-3305
DOI - 10.1049/joe.2019.0241
Subject(s) - benzocyclobutene , materials science , patch antenna , optoelectronics , antenna (radio) , microstrip antenna , coaxial antenna , electrical engineering , dielectric , engineering
This study designs a micro‐machined BCB‐cavity patch antenna and two types of four‐element micro‐machined antenna arrays at 100 GHz. The patches are fabricated on Benzocyclobutene (BCB) polymer material. The silicon substrate is selective lateral etched under the patch antenna to fabricate a cavity surrounded by metal and filled with BCB material. The BCB‐cavity under patches can reduce the excitation of surface waves and enhance the radiation on performance. A single large BCB‐cavity is designed to implement the four‐element antenna arrays under the consideration of mutual coupling. The proposed single antenna has a 2.8 GHz impedance bandwidth. At 100 GHz, the simulated maximum gain is 6.7 dBi for the single antenna and 13 dBi for the four‐element antenna arrays.