Open AccessFabrication of Al microtubes by electromigration and controlled etching
Author(s) -
Lu Yebo,
Liu Chuhui,
Peng Wenli
Publication year - 2016
Publication title -
the journal of engineering
Language(s) - English
Resource type - Journals
ISSN - 2051-3305
DOI - 10.1049/joe.2016.0162
Subject(s) - electromigration , fabrication , materials science , etching (microfabrication) , anode , composite material , metal , optoelectronics , nanotechnology , metallurgy , electrode , chemistry , medicine , alternative medicine , pathology , layer (electronics)
Al microtubes were fabricated by electromigration and controlled etching. Samples consisted of thin Al films with slits and discharge holes near the anode. Al atoms accumulated and discharged forming a microwire, which was then etched into a hollow microtube. Al microtubes could be fabricated at predetermined positions, with their lengths dependent on the current supply duration. The outer and inner diameters of the Al microtube could be determined by controlling the size of the etched hole. This technique has potential in the fabrication of other metallic microtubes.