Open AccessZnO nanorod‐based Love wave delay line for high mass sensitivity: a finite element analysis
Author(s) -
Trivedi Shyam,
Nemade Harshal B.
Publication year - 2019
Publication title -
iet science, measurement and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.418
H-Index - 49
eISSN - 1751-8830
pISSN - 1751-8822
DOI - 10.1049/iet-smt.2018.5239
Subject(s) - nanorod , materials science , resonance (particle physics) , sensitivity (control systems) , finite element method , stress (linguistics) , swing , optoelectronics , substrate (aquarium) , acoustics , nanotechnology , physics , atomic physics , electronic engineering , oceanography , geology , linguistics , philosophy , engineering , thermodynamics
This study presents finite element time‐domain simulation of a SiO 2 / 36 ° ‐YX LiTaO 3 Love wave (LW) delay line to explore coupled resonance phenomenon with ZnO nanorods designed on the top surface of the device. The effect of variation in ZnO nanorods height on the propagation of LW, mode‐transitions, area‐averaged stress, insertion loss, and mass sensitivity of the device is studied. Simulation results show that at the critical height of ZnO nanorods, coupled resonance occurs that causes a sharp swing in the phase shift indicating a transition from inertial to elastic loading. Coupled resonance increases the acoustic impedance of the device and also the average stress between nanorod and substrate interface. Simulation of mass loading is performed by applying an incremental surface mass density on the active area of the device. A nanorod packing density of 1μm − 2gives a high mass sensitivity of 728m 2 kg − 1which is more than ten times the sensitivity of a plain LW device. At the coupled resonant height, the insertion loss of the sensor increases, and a swing of about 1 dB is observed with variation in the nanorod height.