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Thermodynamic control of MEMS meteorology pressure sensing element in low‐temperature application down to −45°C
Author(s) -
Du Lidong,
Zhao Zhan,
Fang Zhen,
Feng Yu,
Yan Jize
Publication year - 2017
Publication title -
iet science, measurement and technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.418
H-Index - 49
eISSN - 1751-8830
pISSN - 1751-8822
DOI - 10.1049/iet-smt.2017.0057
Subject(s) - microelectromechanical systems , calibration , resistor , compensation (psychology) , temperature measurement , temperature control , piezoresistive effect , measurement uncertainty , atmospheric pressure , chip , pressure sensor , materials science , environmental science , nuclear engineering , control theory (sociology) , electronic engineering , mechanical engineering , engineering , meteorology , electrical engineering , physics , computer science , optoelectronics , voltage , thermodynamics , control (management) , quantum mechanics , artificial intelligence , psychoanalysis , psychology
In this study, the authors present an alternative method for poor accuracy of piezoresistive meteorology pressure sensing in low‐temperature environment (down to −45°C) by incorporating external thermodynamic control. In order to use the designed sensor in such a low‐temperature environment, the microelectromechanical systems (MEMS) chip itself has to be kept at 50°C, which is the most common used highest working temperature in meteorology field. The heat compensation is achieved by a pulse‐width modulation controlled heating resistor based on proportional–integral–derivative algorithm. The precision of thermal control was obtained at 50 ± 0.5°C during the bench test. The simulation results from COMSOL software are consisted with lumped element model analysis. Under the condition of environmental temperature down to −45°C, system achieved a maximum absolute error within ±0.5 hPa after pressure calibration.

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