Open AccessBent cantilever radio frequency microelectromechanical system power detector with improved linearity up to 1 W
Author(s) -
Chu Chenlei,
Liao Xiaoping
Publication year - 2019
Publication title -
iet microwaves, antennas and propagation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.555
H-Index - 69
eISSN - 1751-8733
pISSN - 1751-8725
DOI - 10.1049/iet-map.2018.6186
Subject(s) - linearity , cantilever , bent molecular geometry , radio frequency , detector , microelectromechanical systems , power (physics) , transmitter , materials science , electronic engineering , electrical engineering , physics , acoustics , optoelectronics , optics , engineering , quantum mechanics , composite material , channel (broadcasting)
This study reports a bent cantilever radio frequency microelectromechanical system power detector with improved linearity up to 1 W. The proposed device employs an upward bent cantilever for power detection. The novelty of this structure is that the bend of this kind in cantilever can realize the compensation for non‐linear saturation at high power level effectively. As a result, the linearity will be improved on the condition of high power detection. An equivalent circuit model of mechanical principle is established to analyse the bent cantilever behaviour. The whole device is fabricated using GaAs microwave monolithic integrated circuit technology. The bent cantilever is constructed to overcome the stress gradient during deep etching releasing process. Measurement results prove the improved linearity from 100 mW to 1 W and the corresponding sensitivity is 2.8 aF/mW at 10 GHz.