Open AccessWaveguide‐integrated MEMS‐based phase shifter for phased array antenna
Author(s) -
Baghchehsaraei Zargham,
Vorobyov Alexander,
Åberg Jan,
Fourn Erwan,
Sauleau Ronan,
Oberhammer Joachim
Publication year - 2014
Publication title -
iet microwaves, antennas and propagation
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.555
H-Index - 69
eISSN - 1751-8733
pISSN - 1751-8725
DOI - 10.1049/iet-map.2013.0256
Subject(s) - phase shift module , insertion loss , phased array , microelectromechanical systems , materials science , waveguide , fabrication , phase (matter) , optoelectronics , biasing , antenna (radio) , optics , electrical engineering , voltage , engineering , physics , medicine , alternative medicine , pathology , quantum mechanics
This study investigates a new concept of waveguide‐based W‐band phase shifters for applications in phased array antennas. The phase shifters are based on a tuneable bilateral finline bandpass filter with 22 microelectromechanical system (MEMS) switching elements, integrated into a custom‐made WR‐12 waveguide with a replaceable section, whose performance is also investigated in this study. The individual phase states are selected by changing the configuration of the switches bridging the finline slot in specific positions; this leads to four discrete phase states with an insertion loss predicted by simulations better than 1 dB, and a phase shift span of about 270°. MEMS chips have been fabricated in fixed positions, on a pair of bonded 300 µm high‐resistivity silicon substrates, to prove the principle, that is, they are not fully functional, but contain all actuation and biasing‐line elements. The measured phase states are 0, 56, 189 and 256°, resulting in an effective bit resolution of 1.78 bits of this nominal 2 bit phase shifter at 77 GHz. The measured insertion loss was significantly higher than the simulated value, which is assumed to be attributed to narrow‐band design of the devices as the influences of fabrication and assembly tolerances are shown to be negligible from the measurement results.