Open AccessDesign and simulation of a variable MEMS capacitor for tunable HMSIW resonator
Author(s) -
Saberhosseini Seyyedeh Shirin,
Ganji Bahram Azizollah,
Koohsorkhi Javad,
Ghorbani Ayaz
Publication year - 2020
Publication title -
iet circuits, devices and systems
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.251
H-Index - 49
ISSN - 1751-8598
DOI - 10.1049/iet-cds.2019.0511
Subject(s) - variable capacitor , capacitor , microelectromechanical systems , resonator , electronic engineering , voltage , materials science , electrical engineering , engineering , optoelectronics
Here, a new design of a variable micro electromechanical system (MEMS) capacitor is introduced to use in telecommunication systems. For the first time, an on‐chip MEMS component has been used in the substrate integrated waveguide (SIW) structures to avoid discrete and non‐integrated connection problems and high noise levels and affects the operating frequency of telecommunication systems. The behaviour of two capacitors with the fixed–fixed and supported membrane by special spiral arms is analysed and simulated using the finite element method. The MEMS bridges are implemented by a 6 μm gold layer and an air gap of 3 μm. It can be seen that using the new special arms, the movement of the membrane is more uniform than the clamped while the actuation voltage is up to 1.32 V and the tuning range of the capacitor is 29%. Then both the capacitors are placed on half‐mode SIW structure and the electromagnetic simulation is done. Finally, the results comparison shows that the frequency tuning range of the MEMS variable capacitor is more significant than the other.