Piezoelectric performance improvement of ScAlN film and two‐port SAW resonator application | Zendy

Dong Kaifei | Zendy; Wang Fang | Zendy; Deng Meng | Zendy; Yan Shuo | Zendy; Zhang Kailiang | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Piezoelectric performance improvement of ScAlN film and two‐port SAW resonator application

Author(s) -

Dong Kaifei,

Wang Fang,

Deng Meng,

Yan Shuo,

Zhang Kailiang

Publication year - 2019

Publication title -

electronics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.375

H-Index - 146

eISSN - 1350-911X

pISSN - 0013-5194

DOI - 10.1049/el.2019.2714

Subject(s) - resonator , piezoelectricity , materials science , optoelectronics , port (circuit theory) , electrical engineering , acoustics , electronic engineering , engineering , physics

Highly c ‐axis‐oriented scandium‐doped aluminium nitride films (ScAlN) were prepared on platinum substrates by DC magnetron sputtering. The effect of sputtering power on the crystal quality and piezoelectric properties of ScAlN thin film was investigated. The test results show that the piezoelectric properties of the ScAlN film first strengthen and then weaken with the increase of sputtering power, and the optimal piezoelectric properties are obtained under the condition of 180 W. Furthermore, a surface acoustic wave (SAW) resonator with an interdigital transducer width of 500 nm was fabricated by electron beam lithography. The SAW device exhibits a resonant frequency of 1.887 GHz and a quality factor ( Q ) of 170.8.

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research