Open AccessThree‐hot‐wire acoustic particle velocity sensor with improved detection capability
Author(s) -
Li Zhe,
Chang Wenhan,
Gao Chengchen,
Hao Yilong
Publication year - 2019
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2018.7680
Subject(s) - sensitivity (control systems) , materials science , acoustics , microelectromechanical systems , noise (video) , particle velocity , substrate (aquarium) , particle (ecology) , silicon , optoelectronics , electronic engineering , engineering , physics , computer science , oceanography , artificial intelligence , image (mathematics) , geology
This Letter proposes a novel 3‐hot‐wire acoustic particle velocity sensor with high sensitivity and low self‐noise for the first time. Three parallel wires, covered with platinum film, are suspended on silicon substrate by MEMS process. The middle wire works as a heater and the left and right ones work as both heaters and temperature sensors. Compared with the 1‐hot‐wire and 2‐hot‐wire counterparts, this sensor has higher sensitivity and lower self‐noise, showing its potential for sound source localisation, acoustic camera and so on. The self‐noise of the sensor is about 15dB /Hzat 1 kHz and the relative direction sensitivity is as high as 42 dB.