Open AccessParameterised equivalent circuit model of frequency‐dependent resistance and inductance for on‐chip coplanar waveguides up to 110 GHz
Author(s) -
Zheng L.,
Weisshaar A.
Publication year - 2018
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2018.5362
Subject(s) - inductance , chip , equivalent circuit , coplanar waveguide , materials science , electronic engineering , wideband , equivalent series inductance , line (geometry) , acoustics , optoelectronics , electrical engineering , engineering , physics , geometry , mathematics , telecommunications , voltage , microwave
A parameterised wideband equivalent circuit model capturing the per‐unit‐length (p.u.l.) frequency‐dependent resistance and inductance of on‐chip coplanar waveguides (CPWs) is presented. The parameterised model for on‐chip CPWs is suitable for various process nodes and over a large geometry range with signal line width‐to‐thickness ratios w s/ t between 1 and 15 and spacing‐to‐thickness ratios s / t between 0.25 and 15. The model has been validated by both EM simulation and measurements of fabricated test chips. The model is accurate to within 10% over the normalised geometry range. The model can easily be implemented into standard circuit simulators.