Open Accesslaying it on thick
Publication year - 2018
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2018.1410
Subject(s) - germanium , materials science , polycrystalline silicon , sputter deposition , optoelectronics , silicon , substrate (aquarium) , sputtering , electronics , engineering physics , electronic engineering , thin film transistor , nanotechnology , electrical engineering , thin film , layer (electronics) , engineering , oceanography , geology
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