Open AccessMEMS microwave power sensor with thermovoltage compensation and transformation
Author(s) -
Li Chenglin,
Liao Xiaoping,
Yan Hao
Publication year - 2018
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2018.0299
Subject(s) - microelectromechanical systems , compensation (psychology) , transformation (genetics) , microwave , power (physics) , electronic engineering , electrical engineering , materials science , computer science , engineering , optoelectronics , physics , telecommunications , psychology , gene , biochemistry , chemistry , quantum mechanics , psychoanalysis
An MEMS microwave power sensor with thermovoltage compensation and transformation is presented. The sensor obtains a thermovoltage which is linear to the input power, thanks to the Seebeck effect. However, the thermovoltage decreases as the frequency of input power increases due to the loss. The novelty is that the variation of thermovoltage has been compensated by an algorithm, and a transformation line is obtained to transform the thermovoltage to measured power displayed on liquid crystal display. The result indicates that the relative error is smaller than 1.5%. This system has practical applications in precise power measuring instruments.