Open AccessFemtosecond laser fabricated polymer microring resonator for sensing applications
Author(s) -
Zhang D.,
Men L.,
Chen Q.
Publication year - 2018
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2017.4585
Subject(s) - femtosecond , refractive index , materials science , resonator , interferometry , optics , blueshift , laser , optoelectronics , sensitivity (control systems) , photoresist , wavelength , resonance (particle physics) , physics , nanotechnology , layer (electronics) , particle physics , electronic engineering , photoluminescence , engineering
A microring resonator realised by femtosecond laser two‐photon photopolymerisation in an epoxy‐based negative photoresist (SU‐8) is proposed and demonstrated, which is further proved to be capable of temperature and refractive index sensing by monitoring the shift of the resonance wavelength of the interferometric pattern. The experimental results indicate refractive index sensitivity of 12.50 nm/refractive index unit (redshift) and temperature sensitivity of −9.51 × 10 −2 nm/ o C (blueshift), respectively.