Open AccessLagrange multiplier‐based error compensation of heterodyne interferometer
Author(s) -
Lee K.,
Pyo Y.,
You K.
Publication year - 2016
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2016.1815
Subject(s) - heterodyne (poetry) , interferometry , lagrange multiplier , capacitive sensing , multiplier (economics) , obstacle , compensation (psychology) , optics , scale factor (cosmology) , physics , computer science , acoustics , psychology , cosmology , quantum mechanics , metric expansion of space , law , political science , economics , psychoanalysis , dark energy , macroeconomics , operating system
The heterodyne laser interferometer is an ultra‐precise measurement apparatus. However, its susceptibility to environmental error is an obstacle to improve its nanometre‐scale measurement accuracy. To minimise the environmental error factor, a compensation algorithm using a Lagrange multiplier method is proposed. The improved accuracy of the proposed method was verified by means of experiments using nanometre‐scale measurements of a capacitive displacement sensor.