Open AccessLow‐loss compact MEMS phase shifter for phased array antennas
Author(s) -
Abdellatif A.S.,
Abdel Aziz A.,
Mansour R.R.,
SafaviNaeini S.
Publication year - 2015
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2015.0876
Subject(s) - phase shift module , insertion loss , microelectromechanical systems , phased array , materials science , surface micromachining , variable capacitor , capacitor , antenna (radio) , microwave , fabrication , phase (matter) , return loss , monolithic microwave integrated circuit , actuator , optoelectronics , electrical engineering , engineering , physics , telecommunications , voltage , cmos , medicine , amplifier , alternative medicine , pathology , quantum mechanics
A compact and low‐loss MEMS‐based phase shifter is proposed for microwave/millimetre‐wave phased array antenna systems. The proposed phase shifter is an alumina‐based CPW line, loaded with a variable series capacitor. The phase shifter uses an electromagnetic MEMS actuator to change the capacitor value. A simple three‐mask surface micromachining process has been developed for device fabrication. The measurements at 26 GHz show a phase shift of 20°. The overall size of the phase shifter (including the actuator) is 0.5 × 1.5 mm. The measured average insertion loss is 0.75 dB with a variation of 0.4 dB for different phase shifts across the band from 24.5 to 26.5 GHz.