Open AccessReflective displacement sensors with monolithically integrated VCSELs and RCEPDs
Author(s) -
Song Y.M.,
Ju G.W.,
Choi H.J.,
Lee Y.W.,
Na B.H.,
Lee Y.T.
Publication year - 2015
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2015.0299
Subject(s) - displacement (psychology) , materials science , photodetector , vertical cavity surface emitting laser , optics , laser , optoelectronics , fabrication , physics , medicine , psychology , alternative medicine , pathology , psychotherapist
Micro‐scale, reflective‐type optical displacement sensors have been developed by monolithic integration of vertical cavity surface‐emitting lasers (VCSELs) and resonant cavity‐enhanced photodetectors (RCEPDs). This compact sensor (700 × 700 μm) consists of an oxide‐confined VCSEL that is surrounded by an RCEPD and can measure the linear distance with a measurement range of ∼10 mm, which is comparable to that of conventional displacement sensors. Fabrication details and sensor performances are discussed.