Reflective displacement sensors with monolithically integrated VCSELs and RCEPDs | Zendy

Song Y.M. | Zendy; Ju G.W. | Zendy; Choi H.J. | Zendy; Lee Y.W. | Zendy; Na B.H. | Zendy; Lee Y.T. | Zendy

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Reflective displacement sensors with monolithically integrated VCSELs and RCEPDs

Author(s) -

Song Y.M.,

Ju G.W.,

Choi H.J.,

Lee Y.W.,

Na B.H.,

Lee Y.T.

Publication year - 2015

Publication title -

electronics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.375

H-Index - 146

eISSN - 1350-911X

pISSN - 0013-5194

DOI - 10.1049/el.2015.0299

Subject(s) - displacement (psychology) , optoelectronics , materials science , optics , electronic engineering , computer science , engineering , physics , psychology , psychotherapist

Micro‐scale, reflective‐type optical displacement sensors have been developed by monolithic integration of vertical cavity surface‐emitting lasers (VCSELs) and resonant cavity‐enhanced photodetectors (RCEPDs). This compact sensor (700 × 700 μm) consists of an oxide‐confined VCSEL that is surrounded by an RCEPD and can measure the linear distance with a measurement range of ∼10 mm, which is comparable to that of conventional displacement sensors. Fabrication details and sensor performances are discussed.

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