Open AccessAlN film SAW resonator integrated with metal structure
Author(s) -
Shu Lin,
Jiang Jianying,
Peng Bin,
Wang Yu,
Liu Xingzhao
Publication year - 2015
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2014.3495
Subject(s) - materials science , resonator , sputter deposition , nitride , substrate (aquarium) , electromechanical coupling coefficient , aluminium , surface acoustic wave , optoelectronics , aluminium nitride , sputtering , thin film , coupling coefficient of resonators , titanium , piezoelectricity , acoustics , composite material , layer (electronics) , metallurgy , nanotechnology , oceanography , physics , geology
A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid‐frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two‐step growth method, AlN film with a full‐width at half‐maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.