Open AccessCompact thermally actuated latching MEMS switch with large contact force
Author(s) -
Dellaert D.,
Doutreloigne J.
Publication year - 2015
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2014.3234
Subject(s) - microelectromechanical systems , contact force , materials science , actuator , optoelectronics , electrical engineering , mechanical engineering , electronic engineering , engineering , physics , classical mechanics
A novel latching microelectromechanical system (MEMS) switch is reported, which uses a compact configuration of thermal actuators. In the proposed latching mechanism, the necessary displacement of one of the contacts can be reduced, allowing the use of a linear thermal actuator. This linear actuator together with a V‐shaped actuator can be aligned next to each other, requiring less area than the classical latching switch design. Another advantage of the proposed design is the high contact force of 1.33 mN, ensuring a stable contact resistance. The latching switch was fabricated in the Metal multi‐user MEMS processes (MUMPs) technology and its functionality was successfully tested. In the latched state, a switch resistance of 0.6 Ω was measured.