Open AccessHigh‐power in‐phase coherently coupled VCSEL array based on proton implantation
Author(s) -
Xun Meng,
Xu Chen,
Xie Yiyang,
Zhu Yanxu,
Mao Mingming,
Xu Kun,
Wang Jun,
Liu Jie,
Chen Hongda
Publication year - 2014
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2014.1298
Subject(s) - vertical cavity surface emitting laser , materials science , phase (matter) , optoelectronics , power (physics) , optics , laser , beam (structure) , proton , gallium arsenide , beam divergence , continuous wave , laser beam quality , laser beams , physics , quantum mechanics
Three‐element in‐phase coherently coupled arrays of vertical cavity surface‐emitting lasers (VCSELs) were fabricated using proton implantation. The arrays show excellent beam quality with a far‐field divergence of 4°, while maintaining a stable in‐phase mode until a maximum output power of 4 mW under continuous‐wave condition. The process for the arrays is simple and the cost is low.