Open AccessPerformance analysis and characterisation of micro‐nanopositioning systems
Author(s) -
Tan Ning,
Clévy Cédric,
Chaillet Nicolas
Publication year - 2014
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2014.0926
Subject(s) - computer science , electronic engineering , materials science , engineering
Separation and quantification of error components in micro‐nanopositioning systems are presented with theoretical analysis and experimental characterisation, which are illustrated with a single‐axis nanopositioning stage. The concepts of intrinsic and extrinsic repeatabilities are proposed.
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