Open AccessDesign and fabrication of cost‐effective side‐stem micromechanical disk resonator with large capacitive gap
Author(s) -
Phamvan Huan,
Seok Jongwon,
Choi HaeJin
Publication year - 2014
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2014.0665
Subject(s) - resonator , capacitive sensing , fabrication , materials science , torr , q factor , optoelectronics , helical resonator , resonance (particle physics) , optics , electrical engineering , engineering , physics , medicine , alternative medicine , pathology , particle physics , thermodynamics
A high‐performance micromechanical disk resonator is developed for use in mass detection biosensors. The resonator is designed to facilitate easy and cost‐effective fabrication by anchoring the disk on the side stems and increasing the capacitive gap size up to 4.75 µm. The designed disk resonator operates in an elliptic contour‐mode at a resonance frequency of 5.971 MHz with a quality factor of 4272 in ambient air condition and 17 221 in a 600 Torr vacuum environment.