Open AccessVersatility provided by electrostatic torsional microstructure as consequence of its complex dynamics
Author(s) -
Scerri J.,
Grech I.,
Gatt E.,
Casha O.
Publication year - 2014
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
ISSN - 1350-911X
DOI - 10.1049/el.2013.3758
Subject(s) - traverse , nonlinear system , chaotic , voltage , finite element method , microstructure , dynamics (music) , mechanics , process (computing) , simple (philosophy) , classical mechanics , control theory (sociology) , structural engineering , physics , materials science , engineering , computer science , acoustics , geology , electrical engineering , philosophy , geodesy , quantum mechanics , epistemology , artificial intelligence , metallurgy , operating system , control (management)
The results presented show that a simple microstructure involving a plate supported by two tethers can exhibit varied dynamics due to its nonlinearities. The plate vibrates such that the tethers experience a torsional twisting and it is designed within the constraints imposed by the MetalMUMPs process. Each region of operation has different applications and one can traverse through these regions by adjusting the sensing and actuation voltages. As one would expect, the nonlinearities dominate at higher voltages, with the first signs of chaotic trajectories appearing at 75 V. Parameters of the nonlinear model are first determined from finite‐element analysis responses, and results from subsequent numerical simulations for each region are presented.