Silicon‐based nanoplasmonic disc resonator on CMOS platform | Zendy

Nielsen M.P. | Zendy; Elezzabi A.Y. | Zendy

AI Assistant Blog Pricing

Home ZAIA Blog

Open Access

Silicon‐based nanoplasmonic disc resonator on CMOS platform

Author(s) -

Nielsen M.P.,

Elezzabi A.Y.

Publication year - 2013

Publication title -

electronics letters

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.375

H-Index - 146

eISSN - 1350-911X

pISSN - 0013-5194

DOI - 10.1049/el.2013.2209

Subject(s) - resonator , cmos , materials science , silicon , optoelectronics , electronic engineering , electrical engineering , engineering

The first demonstration of a silicon‐based metal–insulator–semiconductor (MIS) nanoplasmonic disc resonator monolithically integrated on a CMOS compatible platform is presented. The nanoplasmonic disc resonator is integrated with Au/SiO 2 /Si MIS nanoplasmonic waveguides and conventional silicon‐on‐insulator photonic waveguides. The device has a high plasmonic quality ( Q ) factor of 82.3, one of the highest reported for an integrated silicon‐based nanoplasmonic device, with a compact device footprint of only 4 µm 2 .

The content you want is available to Zendy users.

Already have an account? Click here to sign in.

Having issues? You can contact us here

Accelerating Research