Open AccessSilicon‐based nanoplasmonic disc resonator on CMOS platform
Author(s) -
Nielsen M.P.,
Elezzabi A.Y.
Publication year - 2013
Publication title -
electronics letters
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.375
H-Index - 146
eISSN - 1350-911X
pISSN - 0013-5194
DOI - 10.1049/el.2013.2209
Subject(s) - resonator , cmos , materials science , silicon , optoelectronics , electronic engineering , electrical engineering , engineering
The first demonstration of a silicon‐based metal–insulator–semiconductor (MIS) nanoplasmonic disc resonator monolithically integrated on a CMOS compatible platform is presented. The nanoplasmonic disc resonator is integrated with Au/SiO 2 /Si MIS nanoplasmonic waveguides and conventional silicon‐on‐insulator photonic waveguides. The device has a high plasmonic quality ( Q ) factor of 82.3, one of the highest reported for an integrated silicon‐based nanoplasmonic device, with a compact device footprint of only 4 µm 2 .