Open AccessA High Precision Software Compensation Algorithm for Silicon Piezoresistive Pressure Sensor
Author(s) -
Wu Tianshu,
Chen Shuyu,
Wu Peng,
Nie Shaozhong
Publication year - 2019
Publication title -
chinese journal of electronics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.267
H-Index - 25
eISSN - 2075-5597
pISSN - 1022-4653
DOI - 10.1049/cje.2019.05.001
Subject(s) - piezoresistive effect , compensation (psychology) , silicon , computer science , software , algorithm , pressure sensor , materials science , optoelectronics , engineering , mechanical engineering , programming language , psychology , psychoanalysis
There are generally zero drift, sensitivity drift and nonlinear error in silicon piezoresistive pressure sensors due to the inherent characteristics of semiconductor materials. It is necessary to compensate and correct the errors produced so as to meet the requirements of measurement accuracy. In order to further improve the compensation precision, based on the research of various basic software compensation methods, a surface fitting compensation algorithm based on least square method is designed, and the software is implemented on the Visual Basic platform. The experimental results show that the zero drift, sensitivity drift and nonlinear error is effectively eliminated, and the output precision of the sensor is greatly improved.