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First tests of a dipole lens for a scanning electron microscope
Author(s) -
Crewe A. V.,
Kapp O. H.
Publication year - 2003
Publication title -
journal of microscopy
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.569
H-Index - 111
eISSN - 1365-2818
pISSN - 0022-2720
DOI - 10.1046/j.1365-2818.2003.01096.x
Subject(s) - lens (geology) , microscope , scanning electron microscope , optics , electron microscope , dipole , resolution (logic) , low voltage electron microscope , electron , 4pi microscope , materials science , conventional transmission electron microscope , physics , scanning transmission electron microscopy , computer science , artificial intelligence , quantum mechanics
Summary We have previously shown that a dipole lens has superior properties that are particularly suited for use in a low voltage scanning electron microscope (SEM) (Tsai & Crewe, 1996). The aberrations are lower than for any other type of lens and lead to a prediction of high resolution. We describe the construction details of a microscope based on this principle and present some early results.